Cold Cathode Gauges

MPG40X

ATM to Ultra High Vacuum Gauge

Prices & Availability
MPG40x
Drop-in Options

Revolutionize your vacuum gauge experience with us!

The INFICON Inverted Magnetron Pirani Gauges, MPG400 and MPG401, measure from 5 x 10-9 mbar to atmosphere (3.8 x 10-9 Torr to atmosphere). 

Combining technologies into one single compact unit withone logarithmic analog out put signal significantly reduces the complexity of installation, setup andintegration.

Advantages

  • Combination gauge – Inverted Magnetron & Pirani
  • Wide measurement range from 5 x 10-9 mbar to atmosphere
  • No filament to burn out
  • Excellent ignition properties
  • Easy to clean
  • FPM or metal-sealed feedthrough
  • LED indicator for high voltage on
  • Logarithmic analog output signal

Typical applications

  • High vacuum pressure monitoring
  • Base pressure for evaporation and sputtering systems
  • General vacuum measurement and control in the medium and high vacuum range

Specifications

MPG400 FPM sealed
MPG401 metal-sealed
Measurement range (air, N2)mbar
Torr
5 x 10-9 … 1000
3.8 x 10-9 … 760
Accuracy  
1 x 10-8 … 100 mbar% of reading≈±30%
Repeatability  
1 x 10-8 … 100 mbar% of reading≈±5%
Temperature  
Operation (ambient)°C+5 … +55
Storage°C–40 … +65
Bake-out (1)°C150
Supply voltage  
At gaugeV (dc)+15 … +30
At supply unit with max. cable length (2)V (dc)+16 … +30
RippleV (p-p)≤1
Power consumptionW≤2
Materials exposed to vacuum stainless steel, Al2O3, FPM75, Mo, Ni, Au, W
   
(1) Without electronics and magnetic shielding.
(2) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable.
Measurement range (air, N2)mbar
Torr
5 x 10-9 … 1000
3.8 x 10-9 … 760
Accuracy  
1 x 10-8 … 100 mbar% of reading≈±30%
Repeatability  
1 x 10-8 … 100 mbar% of reading≈±5%
Temperature  
Operation (ambient)°C+5 … +55
Storage°C–40 … +65
Bake-out (1)°C150
Supply voltage  
At gaugeV (dc)+15 … +30
At supply unit with max. cable length (2)V (dc)+16 … +30
RippleV (p-p)≤1
Power consumptionW≤2
Materials exposed to vacuum stainless steel, Al2O3, Ag, Cu, Sn, Mo, Ni, Au, W
   
(1) Without electronics and magnetic shielding.
(2) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable.
Download full specifications

Order Information

Product
Spare parts
Accessories
MPG400 DN 25 ISO-KF
351-010
MPG400 DN 40 ISO-KF
351-011
MPG400 DN 40 CF-F
351-012
MPG401 DN 25 ISO-KF
351-020
MPG401 DN 40 ISO-KF
351-021
MPG401 DN 40 CF-F
351-022
MPG40x Ignition tool set
351-994
MPG40x Ignition tool set
351-994
MxG40x/50x Spare parts ignition aid (10)
351-995
MxG40x/50x Spare parts ignition aid (10)
351-995
MPG401 Repair set
351-996
MPG401 Maintenance set
351-997
MPG400 Repair set.
351-998
MPG400 Maintenance set
351-999
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