Mass Spectrometers
High-performance mass spectrometers from INFICON deliver precise gas analysis for semiconductor manufacturing processes, industrial coating and vacuum processes, research, and environmental monitoring. Our advanced technology enables real-time detection of trace gases to improve quality control and process efficiency while minimizing equipment downtime.
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QMG 800 Analytical Mass Spectrometer – Surpass detection limits and elevate your process to new heights of innovation
- Advanced digital platform allows communication over OPC UA
- Seamless OEM integration
- Ion source options for Diverse Applications
- Fully compatible with the complete FabGuard® software suite for unparalleled diagnostics
- 90° off-axis SEM to minimize noise from radicals and non-ionized particles
- Unparalleled precision and sensitivity with single ion detection capabilities
Advanced process expert for Multi-Pressure ALD/CVD and Etch
- xParts coated for extended lifetime in harsh chemistry
- Multi pressure sampling inlet
- Detection limit below 10 ppb
- Industry leading pumping speed
Advanced process expert for Single Pressure ALD/CVD and Etch.
- xParts coated for extended lifetime in harsh chemistry
- High temperature single pressure inlet
- Detection limit below 10 ppb
- Industry leading pumping speed
Compact Process Expert for Advanced Process Monitoring
- HexBlock multi-pressure sampling inlet
- Detection limit below 200 ppb
- Industry leading pumping speed
- 30% decrease in system volume
Extreme PVD Process Monitoring Quadrupole Mass Spectrometer
- Industry leading maximum operating pressure
- Optional overpressure isolation valve interlock
- Scans up to 100 amu
High performance quadrupole mass spectrometer
- Nine-decade dynamic range
- Industry leading data collection rate
- Interchangeable sensors and electronics
- Scans up to 300 amu
Multi-Purpose Quadrupole Mass Spectrometer
- Nine-decade dynamic range
- Interchangeable sensors and electronics
- Optional continuous dynode electron multiplier
- Scans up to 200 amu
Process monitoring at target pressure range
- Targeted high pressure processes
- Single pressure sampling inlet
- Detection limit below 1 ppm
- Integrated differential pumping system